(Invited) Photo-Assisted ALD: Process Development and Application Perspectives

Application of Proteomics Technologies in the Drug Development Process

Visualization-assisted Photo Elicitation Introduction

Application of Proteomics Technologies in the Drug Development Process

Volatile Guanidinato-based Metalorganic Precursors for Ald Process

Film properties of TaN-based metal (TaCN and TaSiN) have been precisely controlled for plasma enhanced ALD (PEALD) and thermal ALD with additives of N2 or NH3. Film resistivity (ρ) strongly depended on the nitrogen concentration of TaN-based metal. These films showed conformal step-coverage for high-aspect (>6) 50nm-wide trenches. Consequently, ALD TaN-based metal is promising for microelectron...

Development, Perspectives and Application Possibilities of Situational Control of Complexes

The proposed paper gives a brief survey of situational control (SC) of complex systems development, also a brief survey of applications that were realized in the past period (SC of robotic technological complexes, SC of electric network, SC in metallurgy, SC in biomedicine, situational modeling, situational classification in projecting, etc.) The paper also deals with problems of decision – mak...